Large-grain polysilicon MOSFET for 3-D integrated circuits

Keyphrases

• Large Grain 100%
• MOSFET 100%
• Complementary Metal Oxide Semiconductor 100%
• Polysilicon 100%
• 3D IC 100%
• Two-layer 50%
• High Performance 50%
• Wafer 50%
• Transistor 50%
• Silicon-on-insulator 50%
• Insulating Layer 50%
• Three-dimensional Circuits 50%
• Metal-oxide-semiconductor Structure 50%

Engineering

• Metal-Oxide-Semiconductor Field-Effect Transistor 100%
• Metal Oxide Semiconductor 100%
• Integrated Circuit 100%
• Polysilicon 100%
• Insulating Layer 50%
• Silicon on Insulator 50%
• Semiconductor Structure 50%
• Realization 50%

Material Science

• Metal Oxide 100%
• Metal-Oxide-Semiconductor Field-Effect Transistor 100%
• Oxide Semiconductor 100%
• Electronic Circuit 100%
• Semiconductor Structure 50%
• Transistor 50%
• Silicon 50%