Ion beam sputtering deposition and etching of high T_cYBCO superconducting thin films

Keyphrases

• Ion Source 100%
• Ion Beam Sputtering 100%
• Superconducting Thin Films 100%
• YBCO Film 100%
• Chemical Etching 50%
• Substrate Temperature 50%
• Ar Ions 50%
• YBCO Thin Film 50%
• Edge Pattern 50%
• Drying Techniques 50%
• Sputtering Gas 50%
• XRD Method 50%
• Micro-bridge 50%
• Thin Superconducting Film 50%
• Deposition Parameters 50%
• Superconducting Properties 50%
• Lithographic Technique 50%
• SEM Technique 50%
• Ceramic Target 50%
• Etching Parameters 50%
• Ion Beam Etching 50%
• Powder Target 50%
• Target Composition 50%
• Temperature Targets 50%

Material Science

• Superconducting Film 100%
• Film 100%
• Wet Etching 50%
• Scanning Electron Microscopy 50%
• X-Ray Diffraction 50%
• Magnesium Oxide 50%
• Thin Films 50%