Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films

Xing R. Zhao; Jianhua Hao; Fang Q. Zhou; Han D. Sun; Lingjie Wang; Xin J. Yi

Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films

Xing R. Zhao
, Jianhua Hao
, Fang Q. Zhou
, Han D. Sun
, Lingjie Wang
, Xin J. Yi

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	Publ by Int Soc for Optical Engineering
Pages	772-774
Number of pages	3
Volume	1519
Edition	pt 2
ISBN (Print)	0819406465
Publication status	Published - 1 Dec 1991
Externally published	Yes
Event	International Conference on Thin Film Physics and Applications - '91 TFPA - Shanghai, China Duration: 15 Apr 1991 → 17 Apr 1991

Conference

Conference	International Conference on Thin Film Physics and Applications - '91 TFPA
Country/Territory	China
City	Shanghai
Period	15/04/91 → 17/04/91

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

@inproceedings{3d9b517c5ad34308a5ce505a81ce5b06,

title = "Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films",

abstract = "High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.",

author = "Zhao, \{Xing R.\} and Jianhua Hao and Zhou, \{Fang Q.\} and Sun, \{Han D.\} and Lingjie Wang and Yi, \{Xin J.\}",

year = "1991",

month = dec,

day = "1",

language = "English",

isbn = "0819406465",

volume = "1519",

pages = "772--774",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "Publ by Int Soc for Optical Engineering",

edition = "pt 2",

note = "International Conference on Thin Film Physics and Applications - '91 TFPA ; Conference date: 15-04-1991 Through 17-04-1991",

}

Zhao, XR, Hao, J, Zhou, FQ, Sun, HD, Wang, L & Yi, XJ 1991, Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films. in Proceedings of SPIE - The International Society for Optical Engineering. pt 2 edn, vol. 1519, Publ by Int Soc for Optical Engineering, pp. 772-774, International Conference on Thin Film Physics and Applications - '91 TFPA, Shanghai, China, 15/04/91.

Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films. / Zhao, Xing R.; Hao, Jianhua; Zhou, Fang Q. et al.
Proceedings of SPIE - The International Society for Optical Engineering. Vol. 1519 pt 2. ed. Publ by Int Soc for Optical Engineering, 1991. p. 772-774.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films

AU - Zhao, Xing R.

AU - Hao, Jianhua

AU - Zhou, Fang Q.

AU - Sun, Han D.

AU - Wang, Lingjie

AU - Yi, Xin J.

PY - 1991/12/1

Y1 - 1991/12/1

N2 - High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.

AB - High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.

UR - https://www.scopus.com/pages/publications/0026406720

M3 - Conference article published in proceeding or book

SN - 0819406465

VL - 1519

SP - 772

EP - 774

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - Publ by Int Soc for Optical Engineering

T2 - International Conference on Thin Film Physics and Applications - '91 TFPA

Y2 - 15 April 1991 through 17 April 1991

ER -

Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films

Abstract

Conference

ASJC Scopus subject areas

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