Abstract
High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.
Original language | English |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
Publisher | Publ by Int Soc for Optical Engineering |
Pages | 772-774 |
Number of pages | 3 |
Volume | 1519 |
Edition | pt 2 |
ISBN (Print) | 0819406465 |
Publication status | Published - 1 Dec 1991 |
Externally published | Yes |
Event | International Conference on Thin Film Physics and Applications - '91 TFPA - Shanghai, China Duration: 15 Apr 1991 → 17 Apr 1991 |
Conference
Conference | International Conference on Thin Film Physics and Applications - '91 TFPA |
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Country/Territory | China |
City | Shanghai |
Period | 15/04/91 → 17/04/91 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering