Ion-beam-sputtering deposition and etching of high-Tc YBCO superconducting thin films

Xing R. Zhao, Jianhua Hao, Fang Q. Zhou, Han D. Sun, Lingjie Wang, Xin J. Yi

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)


High Tc YBaCuO superconducting films have been prepared with ceramic and powder targets, the typical deposition parameters have been given. We also patterned YBCO films with a parallel Ar ion source. Little degradation of Tco by the etching was observed.
Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherPubl by Int Soc for Optical Engineering
Number of pages3
Editionpt 2
ISBN (Print)0819406465
Publication statusPublished - 1 Dec 1991
Externally publishedYes
EventInternational Conference on Thin Film Physics and Applications - '91 TFPA - Shanghai, China
Duration: 15 Apr 199117 Apr 1991


ConferenceInternational Conference on Thin Film Physics and Applications - '91 TFPA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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