Investigation of the heating behavior of carbide-bonded graphene coated silicon wafer used for hot embossing

Gao Yang, Lihua Li, Wing Bun Lee, Man Cheung Ng, Chang Yuen Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

5 Citations (Scopus)

Abstract

A recently developed carbide-bonded graphene (CBG) coated silicon wafer was found to be an effective micro-patterned mold material for implementing rapid heating in hot embossing processes owing to its superior electrical and thermal conductivity, in addition to excellent mechanical properties. To facilitate the achievement of precision temperature control in the hot embossing, the heating behavior of a CBG coated silicon wafer sample was experimentally investigated. First, two groups of controlled experiments were conducted for quantitatively evaluating the influence of the main factors such as the vacuum pressure and gaseous environment (vacuum versus nitrogen) on its heating performance. The electrical and thermal responses of this sample under a voltage of 60 V were then intensively analyzed, and revealed that it had somewhat semi-conducting properties. Further, we compared its thermal profiles under different settings of the input voltage and current limiting threshold. Moreover, the strong temperature dependence of electrical resistance for this material was observed and determined. Ultimately, the surface temperature of CBG coated silicon wafer could be as high as 1300 ℃, but surprisingly the graphene coating did not detach from the substrate under such an elevated temperature due to its strong thermal coupling with the silicon wafer.
Original languageEnglish
Pages (from-to)130-140
Number of pages11
JournalApplied Surface Science
Volume435
DOIs
Publication statusPublished - 30 Mar 2018

Keywords

  • Carbide-bonded graphene
  • Heating behavior
  • Hot embossing
  • Mold coating
  • Silicon

ASJC Scopus subject areas

  • Surfaces, Coatings and Films

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