Investigation of soft X-ray transmission grating made by ion beam etching technique

Shaojun Fu; Yilin Hong; Xiaoming Tao; Yonggang Su; Yongjian Tang; Zhijian Zheng; Daoyuan Tang

Investigation of soft X-ray transmission grating made by ion beam etching technique

Shaojun Fu
, Yilin Hong
, Xiaoming Tao
, Yonggang Su
, Yongjian Tang
, Zhijian Zheng
, Daoyuan Tang

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

Soft X-ray gold transmission grating with polymide membrane substrate was developed by using holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating the grating were investigated. The experimental results were given and discussed. The 8531/mm and 8801/mm gold transmission gratings, which can operate at the waveband of 0.8-1.5 nm, were successfully developed. Their experimental results in inertial confinement fusion were given in this paper.

Original language	English
Pages (from-to)	825-829
Number of pages	5
Journal	Guangxue Xuebao/Acta Optica Sinica
Volume	12
Issue number	9
Publication status	Published - 1 Sept 1992

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Cite this

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title = "Investigation of soft X-ray transmission grating made by ion beam etching technique",

abstract = "Soft X-ray gold transmission grating with polymide membrane substrate was developed by using holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating the grating were investigated. The experimental results were given and discussed. The 8531/mm and 8801/mm gold transmission gratings, which can operate at the waveband of 0.8-1.5 nm, were successfully developed. Their experimental results in inertial confinement fusion were given in this paper.",

author = "Shaojun Fu and Yilin Hong and Xiaoming Tao and Yonggang Su and Yongjian Tang and Zhijian Zheng and Daoyuan Tang",

year = "1992",

month = sep,

day = "1",

language = "English",

volume = "12",

pages = "825--829",

journal = "Guangxue Xuebao/Acta Optica Sinica",

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TY - JOUR

T1 - Investigation of soft X-ray transmission grating made by ion beam etching technique

AU - Fu, Shaojun

AU - Hong, Yilin

AU - Tao, Xiaoming

AU - Su, Yonggang

AU - Tang, Yongjian

AU - Zheng, Zhijian

AU - Tang, Daoyuan

PY - 1992/9/1

Y1 - 1992/9/1

N2 - Soft X-ray gold transmission grating with polymide membrane substrate was developed by using holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating the grating were investigated. The experimental results were given and discussed. The 8531/mm and 8801/mm gold transmission gratings, which can operate at the waveband of 0.8-1.5 nm, were successfully developed. Their experimental results in inertial confinement fusion were given in this paper.

AB - Soft X-ray gold transmission grating with polymide membrane substrate was developed by using holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating the grating were investigated. The experimental results were given and discussed. The 8531/mm and 8801/mm gold transmission gratings, which can operate at the waveband of 0.8-1.5 nm, were successfully developed. Their experimental results in inertial confinement fusion were given in this paper.

UR - https://www.scopus.com/pages/publications/0026917125

M3 - Journal article

AN - SCOPUS:0026917125

SN - 0253-2239

VL - 12

SP - 825

EP - 829

JO - Guangxue Xuebao/Acta Optica Sinica

JF - Guangxue Xuebao/Acta Optica Sinica

IS - 9

ER -

Investigation of soft X-ray transmission grating made by ion beam etching technique

Abstract

ASJC Scopus subject areas

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