Soft X-ray gold transmission grating with polymide membrane substrate was developed by using holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating the grating were investigated. The experimental results were given and discussed. The 8531/mm and 8801/mm gold transmission gratings, which can operate at the waveband of 0.8-1.5 nm, were successfully developed. Their experimental results in inertial confinement fusion were given in this paper.
|Number of pages||5|
|Journal||Guangxue Xuebao/Acta Optica Sinica|
|Publication status||Published - 1 Sep 1992|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics