Investigation of soft X-ray transmission grating made by ion beam etching technique

Shaojun Fu, Yilin Hong, Xiaoming Tao, Yonggang Su, Yongjian Tang, Zhijian Zheng, Daoyuan Tang

Research output: Journal article publicationJournal articleAcademic researchpeer-review


Soft X-ray gold transmission grating with polymide membrane substrate was developed by using holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating the grating were investigated. The experimental results were given and discussed. The 8531/mm and 8801/mm gold transmission gratings, which can operate at the waveband of 0.8-1.5 nm, were successfully developed. Their experimental results in inertial confinement fusion were given in this paper.

Original languageEnglish
Pages (from-to)825-829
Number of pages5
JournalGuangxue Xuebao/Acta Optica Sinica
Issue number9
Publication statusPublished - 1 Sep 1992

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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