Abstract
Soft X-ray gold transmission grating with polymide membrane substrate was developed by using holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating the grating were investigated. The experimental results were given and discussed. The 8531/mm and 8801/mm gold transmission gratings, which can operate at the waveband of 0.8-1.5 nm, were successfully developed. Their experimental results in inertial confinement fusion were given in this paper.
Original language | English |
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Pages (from-to) | 825-829 |
Number of pages | 5 |
Journal | Guangxue Xuebao/Acta Optica Sinica |
Volume | 12 |
Issue number | 9 |
Publication status | Published - 1 Sept 1992 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics