@article{bcd0081850894540928999b4fc174056,
title = "Investigation of mechanical property of LPCVD silicon nitride film with micromachined bridge",
author = "Zong, \{Deng Gang\} and Wang, \{Zuan Kai\} and Lu, \{De Ren\} and Ong, \{Chung Wo\} and Gang Chen",
year = "2003",
month = jan,
day = "1",
language = "English",
volume = "9",
pages = "133",
journal = "Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices",
issn = "1007-4252",
publisher = "Chinese Academy of Sciences",
number = "2",
}