Investigation of mechanical property of LPCVD silicon nitride film with micromachined bridge

Deng Gang Zong, Zuan Kai Wang, De Ren Lu, Chung Wo Ong, Gang Chen

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)133
Number of pages1
JournalGongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices
Issue number2
Publication statusPublished - 1 Jan 2003

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry
  • Electrical and Electronic Engineering

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