Investigation of mechanical property of LPCVD silicon nitride film with micromachined bridge

Deng Gang Zong, Zuan Kai Wang, De Ren Lu, Chung Wo Ong, Gang Chen

Research output: Journal article publication › Journal article › Academic research › peer-review

Original language	English
Pages (from-to)	133
Number of pages	1
Journal	Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices
Volume	9
Issue number	2
Publication status	Published - 1 Jan 2003

ASJC Scopus subject areas

@article{bcd0081850894540928999b4fc174056,

title = "Investigation of mechanical property of LPCVD silicon nitride film with micromachined bridge",

author = "Zong, {Deng Gang} and Wang, {Zuan Kai} and Lu, {De Ren} and Ong, {Chung Wo} and Gang Chen",

year = "2003",

month = jan,

day = "1",

language = "English",

volume = "9",

pages = "133",

journal = "Journal of Functional Materials and Devices",

issn = "1007-4252",

publisher = "Chinese Academy of Sciences",

number = "2",

}

TY - JOUR

T1 - Investigation of mechanical property of LPCVD silicon nitride film with micromachined bridge

AU - Zong, Deng Gang

AU - Wang, Zuan Kai

AU - Lu, De Ren

AU - Ong, Chung Wo

AU - Chen, Gang

PY - 2003/1/1

Y1 - 2003/1/1

UR - http://www.scopus.com/inward/record.url?scp=0038781030&partnerID=8YFLogxK

M3 - Journal article

VL - 9

SP - 133

JO - Journal of Functional Materials and Devices

JF - Journal of Functional Materials and Devices

SN - 1007-4252

IS - 2

ER -