Keyphrases
Lattice Mismatch
100%
Raman Scattering Spectroscopy
100%
XRD Technique
100%
Thin Systems
100%
Residual Stress
75%
Thermal Stress
25%
Room Temperature
25%
Raman Scattering
25%
Film Growth
25%
Compressive Stress
25%
Sapphire
25%
Thick Film
25%
Total Stress
25%
Film Deposition
25%
Deposition Temperature
25%
Raman Shift
25%
Equibiaxial
25%
High-temperature XRD
25%
Epitaxial Silicon Film
25%
Material Science
Lattice Mismatch
100%
X-Ray Diffraction
100%
Thin Films
100%
Residual Stress
75%
Film
50%
Sapphire
25%
Film Deposition
25%
Thermal Stress
25%
Surface (Surface Science)
25%
Film Growth
25%
Silicon
25%
Thick Films
25%
Engineering
Thin Films
100%
Lattice Mismatch
100%
Raman Spectra
100%
Residual Stress
75%
Thermal Stress
25%
Compressive Stress
25%
Deposited Film
25%
Deposition Temperature
25%
Film Silicon
25%
Film Growth Process
25%
Room Temperature
25%
Mathematics
Lattices
100%
Residuals
75%
Total Stress
25%
Room Temperature
25%