Investigation of lattice mismatch stress in SoS thin film systems by Raman scattering and XRD techniques

Mei Liu, Haihui Ruan, Liangchi Zhang

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

3 Citations (Scopus)

Abstract

This paper investigates the residual stress of epitaxial silicon film deposited on Sapphire (SoS). The emphasis is to examine the effect of lattice mismatch on the total stress. To this end, we examined the stress at different depth. For the 5μm to 1.3μm thick films, similar equi-biaxial residual stresses around 580 MPa were detected by Raman scattering, which implies the uniformity of residual stress from the surface of 5 μm film to the depth of 1.3μm close to interface. In a thinner film, however, a larger stress of 724MPa was found, manifesting the effects of lattice mismatch. In order to prove this, high temperature XRD experiment was conducted. It was found that at room temperature, the stress detected by XRD and Raman shift was consistent. When the sample was heated up to the film deposition temperature, where the sample is free from the thermal stress, a compressive stress of 82MPa was detected, which is merely due to lattice mismatch from the film growth process.
Original languageEnglish
Title of host publicationAdvances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA'2011 7th International Conference
Pages159-164
Number of pages6
Publication statusPublished - 1 Dec 2011
Externally publishedYes
Event7th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011 - Milan, Italy
Duration: 4 Jul 20118 Jul 2011

Conference

Conference7th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011
CountryItaly
CityMilan
Period4/07/118/07/11

Keywords

  • High temperature XRD
  • Raman scattering
  • Residual stress
  • Silicon on sapphire

ASJC Scopus subject areas

  • Mechanics of Materials
  • Materials Science(all)

Cite this