Investigation and control of microcracks in tin oxide gas sensing thin-films

Zhenan Tang; Philip Ching Ho Chan; Rajnish K. Sharma; Guizhen Yan; I. Ming Hsing; Johnny K O Sin

doi:10.1016/S0925-4005(01)00846-2

Investigation and control of microcracks in tin oxide gas sensing thin-films

Zhenan Tang, Philip Ching Ho Chan, Rajnish K. Sharma, Guizhen Yan, I. Ming Hsing, Johnny K O Sin

Research output: Journal article publication › Journal article › Academic research › peer-review

33 Citations (Scopus)

Abstract

In this paper, the role of microcracks in tin oxide gas sensing thin-films caused by high temperature annealing is discussed. In our research, cracks in rf sputtered tin oxide thin-films annealed at different conditions were investigated with scanning electron microscopy (SEM). Two techniques were used to reduce the cracking. The first was the use of tin oxide thin-films with copper-doping. The second method involved smoothing the underlying surface through the use of phosphorus-doped silicon glass (PSG). The role of the cracks for enhancing diffusion of moisture and oxygen is discussed using a revised short-circuiting pathway model.

Original language	English
Pages (from-to)	39-47
Number of pages	9
Journal	Sensors and Actuators, B: Chemical
Volume	79
Issue number	1
DOIs	https://doi.org/10.1016/S0925-4005(01)00846-2
Publication status	Published - 25 Sept 2001
Externally published	Yes

Keywords

Microcracks
Thin-film
Tin oxide

ASJC Scopus subject areas

Analytical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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10.1016/S0925-4005(01)00846-2

Cite this

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AU - Sharma, Rajnish K.

AU - Yan, Guizhen

AU - Hsing, I. Ming

AU - Sin, Johnny K O

PY - 2001/9/25

Y1 - 2001/9/25

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AB - In this paper, the role of microcracks in tin oxide gas sensing thin-films caused by high temperature annealing is discussed. In our research, cracks in rf sputtered tin oxide thin-films annealed at different conditions were investigated with scanning electron microscopy (SEM). Two techniques were used to reduce the cracking. The first was the use of tin oxide thin-films with copper-doping. The second method involved smoothing the underlying surface through the use of phosphorus-doped silicon glass (PSG). The role of the cracks for enhancing diffusion of moisture and oxygen is discussed using a revised short-circuiting pathway model.

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Investigation and control of microcracks in tin oxide gas sensing thin-films

Abstract

Keywords

ASJC Scopus subject areas

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