Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc

Zhenghao Gan, Yuebin Zhang, Guoqing Yu, C. M. Tan, Shu Ping Lau, B. K. Tay

Research output: Journal article publicationJournal articleAcademic researchpeer-review

19 Citations (Scopus)


The mechanical properties of diamond like carbon thin films were investigated by using filtered cathodic vacuum arc with different substrates bias voltage. The effect of film thickness on the mechanical properties and to build an empirical relationship among the mechanical properties of thin films were also discussed. It was found that the intrinsic mechanical properties of the DLC thin films were derived by finite element analysis (FEA). The results show that the measured hardness could be used to represent its intrinsic value when the indentation depth was limited to 10% of the film thickness.
Original languageEnglish
Pages (from-to)3509-3515
Number of pages7
JournalJournal of Applied Physics
Issue number7
Publication statusPublished - 1 Apr 2004
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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