Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc

Zhenghao Gan; Yuebin Zhang; Guoqing Yu; C. M. Tan; Shu Ping Lau; B. K. Tay

doi:10.1063/1.1667005

Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc

Zhenghao Gan, Yuebin Zhang, Guoqing Yu, C. M. Tan, Shu Ping Lau, B. K. Tay

Research output: Journal article publication › Journal article › Academic research › peer-review

19 Citations (Scopus)

Abstract

The mechanical properties of diamond like carbon thin films were investigated by using filtered cathodic vacuum arc with different substrates bias voltage. The effect of film thickness on the mechanical properties and to build an empirical relationship among the mechanical properties of thin films were also discussed. It was found that the intrinsic mechanical properties of the DLC thin films were derived by finite element analysis (FEA). The results show that the measured hardness could be used to represent its intrinsic value when the indentation depth was limited to 10% of the film thickness.

Original language	English
Pages (from-to)	3509-3515
Number of pages	7
Journal	Journal of Applied Physics
Volume	95
Issue number	7
DOIs	https://doi.org/10.1063/1.1667005
Publication status	Published - 1 Apr 2004
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.1667005

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abstract = "The mechanical properties of diamond like carbon thin films were investigated by using filtered cathodic vacuum arc with different substrates bias voltage. The effect of film thickness on the mechanical properties and to build an empirical relationship among the mechanical properties of thin films were also discussed. It was found that the intrinsic mechanical properties of the DLC thin films were derived by finite element analysis (FEA). The results show that the measured hardness could be used to represent its intrinsic value when the indentation depth was limited to 10% of the film thickness.",

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AB - The mechanical properties of diamond like carbon thin films were investigated by using filtered cathodic vacuum arc with different substrates bias voltage. The effect of film thickness on the mechanical properties and to build an empirical relationship among the mechanical properties of thin films were also discussed. It was found that the intrinsic mechanical properties of the DLC thin films were derived by finite element analysis (FEA). The results show that the measured hardness could be used to represent its intrinsic value when the indentation depth was limited to 10% of the film thickness.

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Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc

Abstract

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