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Interfacial microstructure and electrical properties of HfAlOxthin films on compressively strained Si83Ge17grown by RF magnetron sputtering

  • X. Y. Qiu
  • , K. C. Chan
  • , P. F. Lee
  • , X. W. Dong
  • , Jiyan Dai

Research output: Journal article publication › Journal article › Academic research › peer-review

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Chemical Engineering