Interfacial and Electrical Properties of Ge MOS Capacitor by ZrLaON Passivation Layer and Fluorine Incorporation

Yong Huang, Jing Ping Xu, Lu Liu, Zhi Xiang Cheng, Pui To Lai, Wing Man Tang

Research output: Journal article publicationConference articleAcademic researchpeer-review

2 Citations (Scopus)

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