Integration of SnO2 thin-film onto micro-hotplate for gas sensor applications

Lie yi Sheng, Philip Ching Ho Chan, Johnny K O Sin

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

Anisotropic silicon etching techniques are widely used in various microsensors to create thermally isolated structures of micro-hotplate. Ethylene-diamine-pyrocatechol is one of the most commonly used anisotropic etchants. To integrate sensor arrays of various types of SnO2 thin-film sensors on the microstructure, a way to photolithographically pattern the SnO2 thin-film is needed. The results from such experiments are discussed.
Original languageEnglish
Title of host publicationProceedings of the IEEE Hong Kong Electron Devices Meeting
PublisherIEEE
Pages145-148
Number of pages4
Publication statusPublished - 1 Dec 1997
Externally publishedYes
EventProceedings of the 1997 IEEE Hong Kong Electron Devices Meeting - Hong Kong, Hong Kong
Duration: 30 Aug 199730 Aug 1997

Conference

ConferenceProceedings of the 1997 IEEE Hong Kong Electron Devices Meeting
Country/TerritoryHong Kong
CityHong Kong
Period30/08/9730/08/97

ASJC Scopus subject areas

  • Engineering(all)

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