Integration of SnO2 thin-film onto micro-hotplate for gas sensor applications

Lie yi Sheng; Philip Ching Ho Chan; Johnny K O Sin

Integration of SnO2 thin-film onto micro-hotplate for gas sensor applications

Lie yi Sheng, Philip Ching Ho Chan, Johnny K O Sin

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

Anisotropic silicon etching techniques are widely used in various microsensors to create thermally isolated structures of micro-hotplate. Ethylene-diamine-pyrocatechol is one of the most commonly used anisotropic etchants. To integrate sensor arrays of various types of SnO2 thin-film sensors on the microstructure, a way to photolithographically pattern the SnO2 thin-film is needed. The results from such experiments are discussed.

Original language	English
Title of host publication	Proceedings of the IEEE Hong Kong Electron Devices Meeting
Publisher	IEEE
Pages	145-148
Number of pages	4
Publication status	Published - 1 Dec 1997
Externally published	Yes
Event	Proceedings of the 1997 IEEE Hong Kong Electron Devices Meeting - Hong Kong, Hong Kong Duration: 30 Aug 1997 → 30 Aug 1997

Conference

Conference	Proceedings of the 1997 IEEE Hong Kong Electron Devices Meeting
Country/Territory	Hong Kong
City	Hong Kong
Period	30/08/97 → 30/08/97

ASJC Scopus subject areas

General Engineering

Cite this

@inproceedings{90a62ad7e76343b6804012dfa7f25462,

title = "Integration of SnO2 thin-film onto micro-hotplate for gas sensor applications",

abstract = "Anisotropic silicon etching techniques are widely used in various microsensors to create thermally isolated structures of micro-hotplate. Ethylene-diamine-pyrocatechol is one of the most commonly used anisotropic etchants. To integrate sensor arrays of various types of SnO2 thin-film sensors on the microstructure, a way to photolithographically pattern the SnO2 thin-film is needed. The results from such experiments are discussed.",

author = "Sheng, {Lie yi} and Chan, {Philip Ching Ho} and Sin, {Johnny K O}",

year = "1997",

month = dec,

day = "1",

language = "English",

pages = "145--148",

booktitle = "Proceedings of the IEEE Hong Kong Electron Devices Meeting",

publisher = "IEEE",

address = "United States",

note = "Proceedings of the 1997 IEEE Hong Kong Electron Devices Meeting ; Conference date: 30-08-1997 Through 30-08-1997",

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T1 - Integration of SnO2 thin-film onto micro-hotplate for gas sensor applications

AU - Sheng, Lie yi

AU - Chan, Philip Ching Ho

AU - Sin, Johnny K O

PY - 1997/12/1

Y1 - 1997/12/1

N2 - Anisotropic silicon etching techniques are widely used in various microsensors to create thermally isolated structures of micro-hotplate. Ethylene-diamine-pyrocatechol is one of the most commonly used anisotropic etchants. To integrate sensor arrays of various types of SnO2 thin-film sensors on the microstructure, a way to photolithographically pattern the SnO2 thin-film is needed. The results from such experiments are discussed.

AB - Anisotropic silicon etching techniques are widely used in various microsensors to create thermally isolated structures of micro-hotplate. Ethylene-diamine-pyrocatechol is one of the most commonly used anisotropic etchants. To integrate sensor arrays of various types of SnO2 thin-film sensors on the microstructure, a way to photolithographically pattern the SnO2 thin-film is needed. The results from such experiments are discussed.

UR - http://www.scopus.com/inward/record.url?scp=0031385643&partnerID=8YFLogxK

M3 - Conference article published in proceeding or book

SP - 145

EP - 148

BT - Proceedings of the IEEE Hong Kong Electron Devices Meeting

PB - IEEE

T2 - Proceedings of the 1997 IEEE Hong Kong Electron Devices Meeting

Y2 - 30 August 1997 through 30 August 1997

ER -

Integration of SnO2 thin-film onto micro-hotplate for gas sensor applications

Abstract

Conference

ASJC Scopus subject areas

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