Integration of horizontal carbon nanotube devices on silicon substrate using liquid evaporation

Zhiyong Xiao, Yang Chai, Yuan Li, Minghui Sun, Philip Ching Ho Chan

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)

Abstract

This paper presents a process to fabricate horizontal carbon nanotube (CNT) components with controllable orientations and positions on silicon substrate. This process makes use of capillary effect to pull down inclined CNT bundles. Liquid wettable to both CNT bundles and silicon substrates was used to generate attractive force to level the CNT. The final orientation of CNT bundles was determined by the initial inclination of the CNT grown. The geometric patterns of catalyst film have significant effect on the initial inclination. Using the electron-shading effect, specially designed catalyst patterns and the liquid evaporation process, we demonstrated good control on the positions, the dimensions, and the orientations of on-chip grown CNT, thus facilitating the on-chip integration of CNT components.
Original languageEnglish
Title of host publication2010 Proceedings 60th Electronic Components and Technology Conference, ECTC 2010
Pages943-947
Number of pages5
DOIs
Publication statusPublished - 9 Aug 2010
Externally publishedYes
Event60th Electronic Components and Technology Conference, ECTC 2010 - Las Vegas, NV, United States
Duration: 1 Jun 20104 Jun 2010

Conference

Conference60th Electronic Components and Technology Conference, ECTC 2010
Country/TerritoryUnited States
CityLas Vegas, NV
Period1/06/104/06/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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