Abstract
This paper presents a process to fabricate horizontal carbon nanotube (CNT) components with controllable orientations and positions on silicon substrate. This process makes use of capillary effect to pull down inclined CNT bundles. Liquid wettable to both CNT bundles and silicon substrates was used to generate attractive force to level the CNT. The final orientation of CNT bundles was determined by the initial inclination of the CNT grown. The geometric patterns of catalyst film have significant effect on the initial inclination. Using the electron-shading effect, specially designed catalyst patterns and the liquid evaporation process, we demonstrated good control on the positions, the dimensions, and the orientations of on-chip grown CNT, thus facilitating the on-chip integration of CNT components.
Original language | English |
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Title of host publication | 2010 Proceedings 60th Electronic Components and Technology Conference, ECTC 2010 |
Pages | 943-947 |
Number of pages | 5 |
DOIs | |
Publication status | Published - 9 Aug 2010 |
Externally published | Yes |
Event | 60th Electronic Components and Technology Conference, ECTC 2010 - Las Vegas, NV, United States Duration: 1 Jun 2010 → 4 Jun 2010 |
Conference
Conference | 60th Electronic Components and Technology Conference, ECTC 2010 |
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Country/Territory | United States |
City | Las Vegas, NV |
Period | 1/06/10 → 4/06/10 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering