Integrated WDM frequency tuner using polysilicon surface micromachining process

Xuming Zhang; Y. L. Lam; A. Q. Liu

doi:10.1117/12.404903

Integrated WDM frequency tuner using polysilicon surface micromachining process

Xuming Zhang
, Y. L. Lam
, A. Q. Liu

Research output: Journal article publication › Conference article › Academic research › peer-review

Abstract

Two monolithically-integrated tunable lasers have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The tunable lasers use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and antireflection coated optical fibers. The difference between the two tunable lasers is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.

Original language	English
Pages (from-to)	187-197
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4230
DOIs	https://doi.org/10.1117/12.404903
Publication status	Published - 1 Dec 2000
Externally published	Yes
Event	Micromachining and Microfabrication - Singapure, Singapore Duration: 28 Nov 2000 → 30 Nov 2000

Keywords

Fiber-optic communication
Frequency tuner
MOEMS
Optical MEMS
Tunable laser
WDM

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

More information

10.1117/12.404903

Cite this

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title = "Integrated WDM frequency tuner using polysilicon surface micromachining process",

abstract = "Two monolithically-integrated tunable lasers have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The tunable lasers use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and antireflection coated optical fibers. The difference between the two tunable lasers is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.",

keywords = "Fiber-optic communication, Frequency tuner, MOEMS, Optical MEMS, Tunable laser, WDM",

author = "Xuming Zhang and Lam, \{Y. L.\} and Liu, \{A. Q.\}",

year = "2000",

month = dec,

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doi = "10.1117/12.404903",

language = "English",

volume = "4230",

pages = "187--197",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Micromachining and Microfabrication ; Conference date: 28-11-2000 Through 30-11-2000",

}

TY - JOUR

T1 - Integrated WDM frequency tuner using polysilicon surface micromachining process

AU - Zhang, Xuming

AU - Lam, Y. L.

AU - Liu, A. Q.

PY - 2000/12/1

Y1 - 2000/12/1

N2 - Two monolithically-integrated tunable lasers have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The tunable lasers use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and antireflection coated optical fibers. The difference between the two tunable lasers is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.

AB - Two monolithically-integrated tunable lasers have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The tunable lasers use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and antireflection coated optical fibers. The difference between the two tunable lasers is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.

KW - Fiber-optic communication

KW - Frequency tuner

KW - MOEMS

KW - Optical MEMS

KW - Tunable laser

KW - WDM

UR - https://www.scopus.com/pages/publications/0034454555

U2 - 10.1117/12.404903

DO - 10.1117/12.404903

M3 - Conference article

SN - 0277-786X

VL - 4230

SP - 187

EP - 197

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Micromachining and Microfabrication

Y2 - 28 November 2000 through 30 November 2000

ER -

Integrated WDM frequency tuner using polysilicon surface micromachining process

Abstract

Keywords

ASJC Scopus subject areas

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