Integrated WDM frequency tuner using polysilicon surface micromachining process

Xuming Zhang, Y. L. Lam, A. Q. Liu

Research output: Journal article publicationConference articleAcademic researchpeer-review


Two monolithically-integrated tunable lasers have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The tunable lasers use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and antireflection coated optical fibers. The difference between the two tunable lasers is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.
Original languageEnglish
Pages (from-to)187-197
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1 Dec 2000
Externally publishedYes
EventMicromachining and Microfabrication - Singapure, Singapore
Duration: 28 Nov 200030 Nov 2000


  • Fiber-optic communication
  • Frequency tuner
  • Optical MEMS
  • Tunable laser
  • WDM

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this