Integrated Manufacturing of Ultra-precision Freeform Optics

Due to the geometry complexity and high precision requirements, it is still a challenge to manufacture ultra-precision freeform surfaces with submicrometer form accuracy and surface finish in nanometer range, which largely depends on comprehensive consideration of advanced optics design, modeling and optimization of the machining process, freeform surface measurement and characterization. This chapter presents the theoretical basis for the establishment of an integrated platform for the design, fabrication, and measurement of ultra-precision freeform surfaces. The chapter firstly gives a literature review on machining and measurement of freeform optics and then presents the layout of the proposed integrated system, which mainly consists of four key modules, including optics design module, data exchange module, machining process simulation and optimization module, and freeform measurement and evaluation module. The proposed Platform is implemented and validated by a series of experiments, and its capability is realized through a trial implementation in the design, fabrication, and measurement of an F-theta lens production. The results show that the proposed integrated platform not only helps to shorten the cycle time for the development of freeform components but also provides an important means for optimizing the surface quality in the ultra-precision machining of freeform surfaces.