Integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

Zhenan Tang; Samuel K H Fung; Darwin T W Wong; Philip Ching Ho Chan; Johnny K O Sin; Peter W. Cheung

Integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

Zhenan Tang, Samuel K H Fung, Darwin T W Wong, Philip Ching Ho Chan, Johnny K O Sin, Peter W. Cheung

Research output: Journal article publication › Journal article › Academic research › peer-review

Abstract

The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port.

Original language	English
Pages (from-to)	174-179
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	B46
Issue number	3
Publication status	Published - 1 Mar 1998
Externally published	Yes

ASJC Scopus subject areas

Analytical Chemistry
Electrochemistry
Electrical and Electronic Engineering

Cite this

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title = "Integrated gas sensor based on tin oxide thin-film and improved micro-hotplate",

abstract = "The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port.",

author = "Zhenan Tang and Fung, {Samuel K H} and Wong, {Darwin T W} and Chan, {Philip Ching Ho} and Sin, {Johnny K O} and Cheung, {Peter W.}",

year = "1998",

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journal = "Sensors and Actuators, B: Chemical",

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T1 - Integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

AU - Tang, Zhenan

AU - Fung, Samuel K H

AU - Wong, Darwin T W

AU - Chan, Philip Ching Ho

AU - Sin, Johnny K O

AU - Cheung, Peter W.

PY - 1998/3/1

Y1 - 1998/3/1

N2 - The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port.

AB - The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port.

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M3 - Journal article

SN - 0925-4005

VL - B46

SP - 174

EP - 179

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 3

ER -

Integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

Abstract

ASJC Scopus subject areas

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