Integrated fuel cell micro power system by microfabrication technique

Zhiyong Xiao, Guizhen Yan, Chunhua Feng, Philip Ching Ho Chan, I. Ming Hsing

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

5 Citations (Scopus)

Abstract

In this paper, we report a silicon/glass based micro fuel cell system fabricated by the micromachining technique. The anode and cathode catalyst layers are formed by directly sputtering platinum on the ICP-etched (Inductively Coupled Plasma) high-aspect-ratio columns on silicon substrate. Integrated gold-based micro current collectors are patterned on the silicon and glass surfaces. This prototypical micro fuel cell fed by H2/O2 demonstrates an output power of 7.10 mw/cm2. An improved power of 12.3 mW/cm2 is achieved by a novel etching process. Both prototypes are also tested with methanol/O2, and the maximum output power is 0.10 mW/cm2 and 0.15 mW/cm2, respectively. Low internal resistance (around 0.7Ω·cm2) is achieved when using thin gold film (200 nm) as current collectors and the catalyst surface roughness does not affect the internal resistance.
Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1856-1859
Number of pages4
Volume2
Publication statusPublished - 9 Nov 2005
Externally publishedYes
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Conference

Conference13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Keywords

  • Integrated Current Collector
  • Micro Fuel Cell
  • Micro Pillars

ASJC Scopus subject areas

  • Engineering(all)

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