Influencing FTO thin film growth with thin seeding layers: a route to microstructural modification

Nuruzzaman Noor, Clair K T Chew, Davinder S. Bhachu, Matthew R. Waugh, Claire J. Carmalt, Ivan P. Parkin

Research output: Journal article publicationJournal articleAcademic researchpeer-review

32 Citations (Scopus)


We report on the seeded growth of fluorine doped tin oxide (FTO) polycrystalline transparent conducting oxide (TCO) thin films on float glass using a novel two-step chemical vapour deposition (CVD) method. Aerosol-assisted CVD (AACVD) was used to grow a seed layer to direct and promote full film growth via an atmospheric pressure CVD (APCVD) overlay. The method allowed for reproducible control over morphology and denser, rougher, higher-performing TCO at a relatively low growth temperature (500 °C). Growth promotion depended on seeding time with an optimal seeding time being present, below which morphology control and conformal coverage was unavailable. The film properties and functional characteristics were characterised by SEM, AFM, XRD, XPS, UV-Vis-Near IR transmittance-reflectance and Hall Effect probe measurements. Highly transparent and electrically conductive films, comparable to commercial materials and with high roughness and low transmission haze values indicate the process yields high quality films with a controllable morphology that can be tuned to desired application. The versatile method provides a route towards the morphological control of high-quality FTO thin films with high optical clarity and low-emissivity properties and can be readily extended to a variety of different substrates and metal oxide materials.
Original languageEnglish
Pages (from-to)9359-9368
Number of pages10
JournalJournal of Materials Chemistry C
Issue number36
Publication statusPublished - 11 Aug 2015
Externally publishedYes

ASJC Scopus subject areas

  • General Chemistry
  • Materials Chemistry


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