INFLUENCE OF THIN FILM MICROSTRUCTURE ON SURFACE ACOUSTIC WAVE VELOCITY.

Keyphrases

• Surface Acoustic Wave 100%
• Acoustic Wave Velocity 100%
• Thin Film Microstructure 100%
• Data Dispersion 100%
• Microstructure 50%
• Transmission Electron Microscopy 50%
• Surface Waves 50%
• Angstrom 50%
• Material Emission Signature 50%
• Acoustic Materials 50%
• Interface Conditions 50%
• Mathematical Expression 50%
• Thermal Processing 50%
• Approximate Model 50%
• Polycrystalline Structure 50%
• Multicrystalline Silicon 50%
• Post-treatment Process 50%
• Silicide Layer 50%
• Wave Velocity Dispersion 50%
• Velocity Dispersion 50%
• Tungsten Silicide 50%
• X-ray Diffraction (XRD) Analysis 50%
• Acoustic Microscope 50%

Engineering

• Thin Films 100%
• Wave Velocity 100%
• Surface Acoustic Wave 100%
• Mathematical Expression 33%
• Silicon Single Crystal 33%
• X-Ray Diffraction Analysis 33%
• Interface Condition 33%
• Approximate Model 33%
• Thermal Processing 33%
• Polycrystalline 33%

Physics

• Thin Films 100%
• Acoustic Wave 100%
• Polycrystalline 33%
• X-Ray Diffraction 33%
• Transmission Electron Microscopy 33%
• Single Crystal 33%
• Surface Wave 33%
• Acoustic Microscope 33%