INFLUENCE OF THIN FILM MICROSTRUCTURE ON SURFACE ACOUSTIC WAVE VELOCITY.

G. M. Crean, Michael Geoffrey Somekh, A. Golanski, J. C. Oberlin

Research output: Journal article publicationConference articleAcademic researchpeer-review

2 Citations (Scopus)

Abstract

Experimental surface acoustic wave velocity dispersion data are reported which were obtained from thin-film tungsten silicide layers (500-2500 angstrom) cosputtered on single-crystal silicon wavers, as a function of various thermal processing treatments. The velocity dispersion data were determined, using an acoustic microscope operating at 375 MHz, by the acoustic material signature (AMS) technique. Transmission electron microscopy and X-ray diffraction analysis were used to characterize the microstructure of these thin films. Simple mathematical expressions for the transmission of a surface wave along a varying polycrystalline structure were used to interrupt the experimental data; the approximate model thus developed makes it possible to access the interface conditions between grains in the material.
Original languageEnglish
Pages (from-to)843-847
Number of pages5
JournalUltrasonics Symposium Proceedings
Publication statusPublished - 1 Dec 1987
Externally publishedYes
EventIEEE 1987 Ultrasonics Symposium, Proceedings. - Denver, CO, United States
Duration: 1 Dec 1987 → …

ASJC Scopus subject areas

  • Engineering(all)

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