Influence of substrate bias on the microstructure and internal stress in Cu films deposited by filtered cathodic vacuum arc

Y. H. Cheng, B. K. Tay, Shu Ping Lau, X. Shi, H. S. Tan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

21 Citations (Scopus)

Abstract

A novel off-plane double bend filtered cathodic vacuum arc technique at ambient temperature was used to deposit copper films. The film's structure and surface morphology were characterized using X-ray diffraction and atomic force microscopy. The influence of substrate bias on grain size, internal stress, surface morphology and crystalline structure was also studied. It was found that the deposited Cu films exhibits face-centred cubic-type (fcc) crystallite structure with preferred orientation growth. The surface roughness and grain size increases with increasing substrate bias.
Original languageEnglish
Pages (from-to)2102-2108
Number of pages7
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume19
Issue number5
DOIs
Publication statusPublished - 1 Sep 2001
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this