Influence of processing conditions on the structure of strontium titanate thin films grown on si by laser mbe

X. Y. Zhou, J. Miao, X. B. Lu, P. F. Lee, Jiyan Dai, H. L.W. Chan, C. L. Choy, Y. Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

3 Citations (Scopus)


Epitaxial SrTiO3 thin films have been deposited on Si (100) substrates by laser molecular-beam epitaxy. The experiments have confirmed that the use of Sr buffer layer is essential for making high quality SrTiO3 film. Apart from this, processing parameters including the deposition temperature and time for each layer also have significant influence on the crystallinity and roughness of SrTiO3. The thin films prepared under optimized conditions were found to have a pure perovskite phase, well crystallized and epitaxially aligned. The electrical measurements indicate that the SrTiO3 film has a capacitance effective thickness of less than 16.
Original languageEnglish
Pages (from-to)109-116
Number of pages8
JournalIntegrated Ferroelectrics
Issue number1
Publication statusPublished - 1 Jan 2006


  • Epitaxy
  • Laser MBE
  • Strontium titanate
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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