Keyphrases
Substrate Bias Voltage
100%
DLC Coating
100%
Substrate Bias
33%
Interface Layer
22%
Microstructure
11%
Adhesive Strength
11%
Carbon Atom
11%
Microstructure Mechanical Properties
11%
Carbon Film
11%
Diamond-like
11%
Morphological Properties
11%
Low Hardness
11%
Wear Resistance
11%
Tribological Properties
11%
Ion Energy
11%
Morphological Study
11%
One-step Process
11%
Laser Raman Spectroscopy
11%
Adhesive Coatings
11%
Engineering
Bias Voltage
100%
Substrate Bias
100%
Interface Layer
16%
Step Process
8%
Adhesive Strength
8%
Diamond-Like Carbon
8%
Ion Energy
8%
Wear Resistance
8%
Material Science
Film
100%
Morphology
28%
Wear Resistance
14%
Diamond Like Carbon Films
14%
Raman Spectroscopy
14%