In situ growth of YBaCuO films by ion beam sputtering

Jianhua Hao, Xingrong Zhao, Fangqiao Zhou, Xinjian Yi, Zaiguang Li

Research output: Journal article publicationJournal articleAcademic researchpeer-review


High quality YBaCuO superconducting thin films were fabricated in situ on ZrO2substrates by ion beam sputtering assisted by a molecular oxygen source. Films were characterized by X-ray diffraction, resistivity measurements and scanning electron microscopy. As-deposited films were highly oriented and exhibited a zero resistance at 88 K and critical current density Jc(77 K) of 106A cm-2. A large diameter powder target was advantageous for adjusting the film composition and improving film uniformity. We demonstrate that by using ion beam sputtering, in situ YBaCuO films, which are equal to or better in film quality than those produced with laser ablation and magnetron sputtering, can be deposited.
Original languageEnglish
Pages (from-to)165-167
Number of pages3
JournalMaterials Science and Engineering B
Issue number2-3
Publication statusPublished - 1 Jan 1994
Externally publishedYes

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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