Abstract
High quality YBaCuO superconducting thin films were fabricated in situ on ZrO2substrates by ion beam sputtering assisted by a molecular oxygen source. Films were characterized by X-ray diffraction, resistivity measurements and scanning electron microscopy. As-deposited films were highly oriented and exhibited a zero resistance at 88 K and critical current density Jc(77 K) of 106A cm-2. A large diameter powder target was advantageous for adjusting the film composition and improving film uniformity. We demonstrate that by using ion beam sputtering, in situ YBaCuO films, which are equal to or better in film quality than those produced with laser ablation and magnetron sputtering, can be deposited.
Original language | English |
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Pages (from-to) | 165-167 |
Number of pages | 3 |
Journal | Materials Science and Engineering B |
Volume | 22 |
Issue number | 2-3 |
DOIs | |
Publication status | Published - 1 Jan 1994 |
Externally published | Yes |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering