Keyphrases
Plasma Treatment
100%
Performance Improvement
100%
SiC Schottky Diode
100%
Fluorine Plasma Treatment
100%
Hydrogen Gas Sensor
100%
WO3 Films
66%
High Performance
33%
Electrical Measurements
33%
Barrier Height
33%
Induced Current
33%
Height Change
33%
Elevated Temperature
33%
Temperature Effect
33%
Adsorption
33%
Hydrogen Concentration
33%
Kinetic Analysis
33%
Adsorption Process
33%
Leakage Current
33%
Gas Sensing
33%
Sensing Behavior
33%
Sensing Properties
33%
Hydrogen Adsorption
33%
Oxide Traps
33%
Gas Sensitivity
33%
Hydrogen Coverage
33%
Adsorption Enthalpy
33%
Hydrogen Temperature
33%
Fluorine Passivation
33%
Engineering
Gas Sensor
100%
Hydrogen Gas
100%
Plasma Treatment
100%
Mols
66%
Passivation
33%
Elevated Temperature
33%
Kinetics Analysis
33%
Barrier Height
33%
Sensing Property
33%
Temperature Dependence
33%
Electrical Measurement
33%
Adsorption
33%
Material Science
Schottky Diode
100%
Adsorption
50%
Oxide Compound
50%