Improved Interfacial and Electrical Properties of GaAs MOS Capacitor with LaON/TiON Multilayer Composite Gate Dielectric and LaON as Interfacial Passivation Layer

Han Han Lu, Lu Liu, Jing Ping Xu, Pui To Lai, Wing Man Tang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

12 Citations (Scopus)

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