Impact of material anisotropy on ultrafast laser dicing of SiC wafers for enhancing efficiency and quality
- Rui Gao
- , Chunjin Wang (Corresponding Author)
- , Qixian Zhang
- , Lingda Xiong
- , Qingzheng Zhang
- , Chen Jiang
Research output: Journal article publication › Journal article › Academic research › peer-review
5
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(Scopus)