Image formation in common path differential profilometers

Michael Geoffrey Somekh; R. K. Appel

doi:10.1117/12.962812

Image formation in common path differential profilometers

Michael Geoffrey Somekh, R. K. Appel

Research output: Journal article publication › Journal article › Academic research › peer-review

2 Citations (Scopus)

Abstract

Several systems have recently been developed that apply various modulations onto the optical beams in order to both enhance the contrast from particular features and to reduce the effects of noise and microphonics. Consequently different imaging responses may be obtained at different photodetector output frequencies. This paper analyses a selection of AC profilometer systems by extending the analysis used for the conventional scanning optical microscope.

Original language	English
Pages (from-to)	99-111
Number of pages	13
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1164
DOIs	https://doi.org/10.1117/12.962812
Publication status	Published - 20 Dec 1989
Externally published	Yes

ASJC Scopus subject areas

Applied Mathematics
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Computer Science Applications

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10.1117/12.962812

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@article{9d46fb7c40e445c9a62ef4e3e992785f,

title = "Image formation in common path differential profilometers",

abstract = "Several systems have recently been developed that apply various modulations onto the optical beams in order to both enhance the contrast from particular features and to reduce the effects of noise and microphonics. Consequently different imaging responses may be obtained at different photodetector output frequencies. This paper analyses a selection of AC profilometer systems by extending the analysis used for the conventional scanning optical microscope.",

author = "Somekh, {Michael Geoffrey} and Appel, {R. K.}",

year = "1989",

month = dec,

day = "20",

doi = "10.1117/12.962812",

language = "English",

volume = "1164",

pages = "99--111",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Image formation in common path differential profilometers

AU - Somekh, Michael Geoffrey

AU - Appel, R. K.

PY - 1989/12/20

Y1 - 1989/12/20

N2 - Several systems have recently been developed that apply various modulations onto the optical beams in order to both enhance the contrast from particular features and to reduce the effects of noise and microphonics. Consequently different imaging responses may be obtained at different photodetector output frequencies. This paper analyses a selection of AC profilometer systems by extending the analysis used for the conventional scanning optical microscope.

AB - Several systems have recently been developed that apply various modulations onto the optical beams in order to both enhance the contrast from particular features and to reduce the effects of noise and microphonics. Consequently different imaging responses may be obtained at different photodetector output frequencies. This paper analyses a selection of AC profilometer systems by extending the analysis used for the conventional scanning optical microscope.

UR - http://www.scopus.com/inward/record.url?scp=84958498255&partnerID=8YFLogxK

U2 - 10.1117/12.962812

DO - 10.1117/12.962812

M3 - Journal article

SN - 0277-786X

VL - 1164

SP - 99

EP - 111

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Image formation in common path differential profilometers

Abstract

ASJC Scopus subject areas

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