Image formation in common path differential profilometers

Michael Geoffrey Somekh, R. K. Appel

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)

Abstract

Several systems have recently been developed that apply various modulations onto the optical beams in order to both enhance the contrast from particular features and to reduce the effects of noise and microphonics. Consequently different imaging responses may be obtained at different photodetector output frequencies. This paper analyses a selection of AC profilometer systems by extending the analysis used for the conventional scanning optical microscope.
Original languageEnglish
Pages (from-to)99-111
Number of pages13
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1164
DOIs
Publication statusPublished - 20 Dec 1989
Externally publishedYes

ASJC Scopus subject areas

  • Applied Mathematics
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Computer Science Applications

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