Abstract
Atomic force microscope(AFM) is a very important instrument with atomistic level resolution, which has been widely employed in the field of micro/nano technology. As a critical part of AFM system, the piezoelectric scanner exists many defects such as hysteresis, creep, and ease of vibration effects, which has become a bottleneck in its further development and application. In this paper, an image-based method by using polar coordinate is presented to model the piezoelectric scanner utilized in AFM, which can effectively avoid the troubles of data acquisition in AFM system. The parameters of its inverse model are identified by the Least-square method(LSM) and an inverse feedforward control strategy is developed. To verify the performance of this strategy, Being CSPM5500 AFM has been employed, the analysis and performance evaluation have been conducted in detail, which demonstrates that the novel hysteresis model and the image-based inverse feedforward control strategy presented in this paper possess a good performance for AFM nano imaging.
Original language | English |
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Title of host publication | 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 |
Pages | 189-194 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 17 Nov 2011 |
Externally published | Yes |
Event | 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China Duration: 7 Aug 2011 → 10 Aug 2011 |
Conference
Conference | 2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 |
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Country/Territory | China |
City | Beijing |
Period | 7/08/11 → 10/08/11 |
Keywords
- atomic force microscope(AFM)
- feedforward control
- Hysteresis modeling
- nano imaging
- polar coordinate
ASJC Scopus subject areas
- Artificial Intelligence
- Electrical and Electronic Engineering
- Mechanical Engineering