Hysteresis modeling and inverse feedforward control of an AFM piezoelectric scanner based on nano images

Hui Tang, Yangmin Li, Xinhua Zhao

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

15 Citations (Scopus)

Abstract

Atomic force microscope(AFM) is a very important instrument with atomistic level resolution, which has been widely employed in the field of micro/nano technology. As a critical part of AFM system, the piezoelectric scanner exists many defects such as hysteresis, creep, and ease of vibration effects, which has become a bottleneck in its further development and application. In this paper, an image-based method by using polar coordinate is presented to model the piezoelectric scanner utilized in AFM, which can effectively avoid the troubles of data acquisition in AFM system. The parameters of its inverse model are identified by the Least-square method(LSM) and an inverse feedforward control strategy is developed. To verify the performance of this strategy, Being CSPM5500 AFM has been employed, the analysis and performance evaluation have been conducted in detail, which demonstrates that the novel hysteresis model and the image-based inverse feedforward control strategy presented in this paper possess a good performance for AFM nano imaging.
Original languageEnglish
Title of host publication2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Pages189-194
Number of pages6
DOIs
Publication statusPublished - 17 Nov 2011
Externally publishedYes
Event2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China
Duration: 7 Aug 201110 Aug 2011

Conference

Conference2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Country/TerritoryChina
CityBeijing
Period7/08/1110/08/11

Keywords

  • atomic force microscope(AFM)
  • feedforward control
  • Hysteresis modeling
  • nano imaging
  • polar coordinate

ASJC Scopus subject areas

  • Artificial Intelligence
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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