Abstract
In this paper, a two-loop controller is proposed to suppress the hysteresis and to achieve a precise motion tracking control for a piezo-driven XY parallel micropositioning system. Specifically, an inner-loop disturbance observer (DOB) is employed to tolerate the unmodeled hysteresis which is treated as a disturbance to the nominal plant model of the system, and an outer-loop feedback controller is used to compensate for the remaining nonlinearities and uncertainties. The effectiveness of the proposed controller over the sole PID controller is demonstrated through experimental studies. Results show that the DOB-based two-loop control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.
Original language | English |
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Title of host publication | 2010 8th World Congress on Intelligent Control and Automation, WCICA 2010 |
Pages | 2014-2019 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 27 Oct 2010 |
Externally published | Yes |
Event | 2010 8th World Congress on Intelligent Control and Automation, WCICA 2010 - Jinan, China Duration: 7 Jul 2010 → 9 Jul 2010 |
Conference
Conference | 2010 8th World Congress on Intelligent Control and Automation, WCICA 2010 |
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Country/Territory | China |
City | Jinan |
Period | 7/07/10 → 9/07/10 |
Keywords
- Disturbance observer
- Hysteresis compensation
- Micro/nano-positioning
- Piezoelectric actuation
ASJC Scopus subject areas
- Control and Systems Engineering
- Software
- Computer Science Applications