Hysteresis compensation of a piezoactuated XY micropositioning system based on disturbance observer

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

3 Citations (Scopus)

Abstract

In this paper, a two-loop controller is proposed to suppress the hysteresis and to achieve a precise motion tracking control for a piezo-driven XY parallel micropositioning system. Specifically, an inner-loop disturbance observer (DOB) is employed to tolerate the unmodeled hysteresis which is treated as a disturbance to the nominal plant model of the system, and an outer-loop feedback controller is used to compensate for the remaining nonlinearities and uncertainties. The effectiveness of the proposed controller over the sole PID controller is demonstrated through experimental studies. Results show that the DOB-based two-loop control can reduce the hysteresis to a negligible level and lead to a motion tracking with submicron accuracy, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.
Original languageEnglish
Title of host publication2010 8th World Congress on Intelligent Control and Automation, WCICA 2010
Pages2014-2019
Number of pages6
DOIs
Publication statusPublished - 27 Oct 2010
Externally publishedYes
Event2010 8th World Congress on Intelligent Control and Automation, WCICA 2010 - Jinan, China
Duration: 7 Jul 20109 Jul 2010

Conference

Conference2010 8th World Congress on Intelligent Control and Automation, WCICA 2010
CountryChina
CityJinan
Period7/07/109/07/10

Keywords

  • Disturbance observer
  • Hysteresis compensation
  • Micro/nano-positioning
  • Piezoelectric actuation

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Computer Science Applications

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