Abstract
To ensure the high quality of ultra-precision products such as semiconductors and optical microscopes, high-tech equipment used to make these products requires a normal working environment with extremely limited vibration. Some of high-tech industry centres are also located in seismic zones: the safety of high-tech equipment during an earthquake event becomes a critical issue. It is thus imperative to find an effective way to ensure the functionality of high-tech equipment against microvibration and to protect high-tech equipment from damage when earthquake events occur. This paper explores the possibility of using a hybrid platform to mitigate two types of vibration. The hybrid platform, on which high-tech equipment is installed, is designed to work as a passive isolation platform to abate mainly acceleration response of high-tech equipment during an earthquake and to function as an actively controlled platform to reduce mainly velocity response of high-tech equipment under normal working condition. To examine the performance of the hybrid platform, the analytical model of a coupled hybrid platform and building system incorporating with magnetostrictive actuators is established. The simulation results obtained by applying the analytical model to a high-tech facility indicate that the proposed hybrid platform is feasible and effective.
Original language | English |
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Pages (from-to) | 943-967 |
Number of pages | 25 |
Journal | Earthquake Engineering and Structural Dynamics |
Volume | 35 |
Issue number | 8 |
DOIs | |
Publication status | Published - 10 Jul 2006 |
Keywords
- High-tech equipment
- Hybrid platform
- Microvibration
- Seismic response
- Vibration control
ASJC Scopus subject areas
- Geotechnical Engineering and Engineering Geology
- Earth and Planetary Sciences (miscellaneous)