Hybrid platform for high-tech equipment protection against earthquake and microvibration

You Lin Xu, Bin Li

Research output: Journal article publicationJournal articleAcademic researchpeer-review

32 Citations (Scopus)

Abstract

To ensure the high quality of ultra-precision products such as semiconductors and optical microscopes, high-tech equipment used to make these products requires a normal working environment with extremely limited vibration. Some of high-tech industry centres are also located in seismic zones: the safety of high-tech equipment during an earthquake event becomes a critical issue. It is thus imperative to find an effective way to ensure the functionality of high-tech equipment against microvibration and to protect high-tech equipment from damage when earthquake events occur. This paper explores the possibility of using a hybrid platform to mitigate two types of vibration. The hybrid platform, on which high-tech equipment is installed, is designed to work as a passive isolation platform to abate mainly acceleration response of high-tech equipment during an earthquake and to function as an actively controlled platform to reduce mainly velocity response of high-tech equipment under normal working condition. To examine the performance of the hybrid platform, the analytical model of a coupled hybrid platform and building system incorporating with magnetostrictive actuators is established. The simulation results obtained by applying the analytical model to a high-tech facility indicate that the proposed hybrid platform is feasible and effective.
Original languageEnglish
Pages (from-to)943-967
Number of pages25
JournalEarthquake Engineering and Structural Dynamics
Volume35
Issue number8
DOIs
Publication statusPublished - 10 Jul 2006

Keywords

  • High-tech equipment
  • Hybrid platform
  • Microvibration
  • Seismic response
  • Vibration control

ASJC Scopus subject areas

  • Geotechnical Engineering and Engineering Geology
  • Earth and Planetary Sciences (miscellaneous)

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