Hybrid control of microvibration of high tech facility under horizontal and vertical ground motion

Hybrid control platform is investigated in this paper for mitigating microvibration of a batch of high tech equipment installed in a high tech facility (building) subject to nearby road vehicle-induced horizontal and vertical ground motions. Hybrid control platform, on which high tech equipment is installed, is mounted on the building floor through a series of passive mounts and controlled by hydraulic actuators in both horizontal and vertical directions. The hybrid control platform is taken as an elastic body with significant bending modes of vibration, and a sub-optimal control algorithm is used to manipulate the hydraulic actuators with the actuator dynamics included. The governing equations of motion of the coupled platform-building system are established in the absolute coordinate to facilitate the feedback control and performance evaluation of the platform. The horizontal and vertical ground motions at the base of the building induced by nearby moving road vehicles are assumed to be random and statistically stationary processes. A typical three-story high tech building is selected as a case study. The case study shows that die ground motion and vibration of the high tech building are higher in the vertical direction than in the horizontal direction. The use of hybrid control platform can effectively reduce both horizontal and vertical microvibrations of a vast quantity of high tech equipment to the level satisfying the most stringent microscale velocity requirement specified in the BBN criteria.