Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering

Dagang Miao, Shou-xiang Kinor Jiang, Songmin Shang, Zhuoming Chen

Research output: Journal article publicationJournal articleAcademic researchpeer-review

76 Citations (Scopus)


AZO/Ag/AZO multilayer films were prepared on PET substrate by radio frequency (RF) magnetron sputtering technology. The prepared films were investigated by optical transmittance spectra, a four-point probe system, X-ray Diffraction (XRD), Scanning Electron Microscope (SEM), Atomic Force Microscopy (AFM), and Fourier Transform Infrared Spectroscopy. The results indicate that Ag inner layer starts forming a continuous film at the thickness about 10 nm. The sample with 10 nm's Ag inner layer exhibited the highest average visible transmittance of 78.5% and 91%'s infrared reflection rate in FIR region. Sample with 15 nm's Ag inner layer showed the highest infrared reflection rate of 96% in FIR region. The high visible transmittance and infrared reflection property of the AZO/Ag/AZO multilayer film makes it a promising candidate for solar films.
Original languageEnglish
Pages (from-to)1-4
Number of pages4
Publication statusPublished - 1 Aug 2014


  • AZO/Ag/AZO
  • Flexible solar films
  • Infrared reflection
  • RF magnetron sputtering

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Instrumentation
  • Surfaces, Coatings and Films

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