Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering

AZO/Ag/AZO multilayer films were prepared on PET substrate by radio frequency (RF) magnetron sputtering technology. The prepared films were investigated by optical transmittance spectra, a four-point probe system, X-ray Diffraction (XRD), Scanning Electron Microscope (SEM), Atomic Force Microscopy (AFM), and Fourier Transform Infrared Spectroscopy. The results indicate that Ag inner layer starts forming a continuous film at the thickness about 10 nm. The sample with 10 nm's Ag inner layer exhibited the highest average visible transmittance of 78.5% and 91%'s infrared reflection rate in FIR region. Sample with 15 nm's Ag inner layer showed the highest infrared reflection rate of 96% in FIR region. The high visible transmittance and infrared reflection property of the AZO/Ag/AZO multilayer film makes it a promising candidate for solar films.