Abstract
We report here a lateral magnetometer fabricated on SOI using 6 masks. The sensor operates similar to a thyristor. With a supply voltage of 0.9 V and a total biasing current of 25 μA, the magnetometer achieves a relative sensitivity of 210%/Tesla and an absolute sensitivity of 105%/Tesla.
Original language | English |
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Pages (from-to) | 143-146 |
Number of pages | 4 |
Journal | Technical Digest - International Electron Devices Meeting |
Publication status | Published - 1 Dec 1994 |
Externally published | Yes |
Event | Proceedings of the 1994 IEEE International Electron Devices Meeting - San Francisco, CA, United States Duration: 11 Dec 1994 → 14 Dec 1994 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Materials Chemistry
- Electrical and Electronic Engineering