Highly sensitive and integrated VOC sensor based on silicon nanophotonics

Z. Y. Li; G. Zhang; Z. C. Yang; Y. L. Hao; Y. F. Jin; A. Q. Liu

doi:10.1109/TRANSDUCERS.2017.7994338

Highly sensitive and integrated VOC sensor based on silicon nanophotonics

Z. Y. Li, G. Zhang, Z. C. Yang, Y. L. Hao, Y. F. Jin, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

5 Citations (Scopus)

Abstract

An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/ 1000 ppm for acetone), high stability (<1 pm drift) and fast response time (∼20 s) make it a perfect candidate for VOC safety monitoring and warning.

Original language	English
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1479-1482
Number of pages	4
ISBN (Electronic)	9781538627310
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994338
Publication status	Published - 26 Jul 2017
Externally published	Yes
Event	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan Duration: 18 Jun 2017 → 22 Jun 2017

Publication series

Name	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/Territory	Taiwan
City	Kaohsiung
Period	18/06/17 → 22/06/17

Keywords

Ring Resonator
Sensor
Silicon Photonic
Volatile Organic Compounds

ASJC Scopus subject areas

Chemical Health and Safety
Instrumentation
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2017.7994338

Cite this

Li, Z. Y., Zhang, G., Yang, Z. C., Hao, Y. L., Jin, Y. F., & Liu, A. Q. (2017). Highly sensitive and integrated VOC sensor based on silicon nanophotonics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1479-1482). Article 7994338 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994338

Li, Z. Y. ; Zhang, G. ; Yang, Z. C. et al. / Highly sensitive and integrated VOC sensor based on silicon nanophotonics. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1479-1482 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

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abstract = "An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/ 1000 ppm for acetone), high stability (<1 pm drift) and fast response time (∼20 s) make it a perfect candidate for VOC safety monitoring and warning.",

keywords = "Ring Resonator, Sensor, Silicon Photonic, Volatile Organic Compounds",

author = "Li, {Z. Y.} and G. Zhang and Yang, {Z. C.} and Hao, {Y. L.} and Jin, {Y. F.} and Liu, {A. Q.}",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

year = "2017",

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Li, ZY, Zhang, G, Yang, ZC, Hao, YL, Jin, YF & Liu, AQ 2017, Highly sensitive and integrated VOC sensor based on silicon nanophotonics. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994338, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., pp. 1479-1482, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994338

Highly sensitive and integrated VOC sensor based on silicon nanophotonics. / Li, Z. Y.; Zhang, G.; Yang, Z. C. et al.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1479-1482 7994338 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Zhang, G.

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AU - Jin, Y. F.

AU - Liu, A. Q.

PY - 2017/7/26

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AB - An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/ 1000 ppm for acetone), high stability (<1 pm drift) and fast response time (∼20 s) make it a perfect candidate for VOC safety monitoring and warning.

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Li ZY, Zhang G, Yang ZC, Hao YL, Jin YF, Liu AQ. Highly sensitive and integrated VOC sensor based on silicon nanophotonics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1479-1482. 7994338. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/TRANSDUCERS.2017.7994338

Highly sensitive and integrated VOC sensor based on silicon nanophotonics

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Keywords

ASJC Scopus subject areas

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