Highly efficient deterministic polishing using a semirigid bonnet

Chunjin Wang, Wei Yang, Zhenzhong Wang, Xu Yang, Zhiji Sun, Bo Zhong, Ri Pan, Ping Yang, Yinbiao Guo, Qiao Xu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

22 Citations (Scopus)

Abstract

This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ. Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ∼36 mm3 of material is removed.

Original languageEnglish
Article number140769
JournalOptical Engineering
Volume53
Issue number9
DOIs
Publication statusPublished - 1 Sep 2014
Externally publishedYes

Keywords

  • aspheric optics
  • bonnet polishing
  • deterministic polishing
  • semirigid bonnet

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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