Highly efficient deterministic polishing using a semirigid bonnet

Chunjin Wang; Wei Yang; Zhenzhong Wang; Xu Yang; Zhiji Sun; Bo Zhong; Ri Pan; Ping Yang; Yinbiao Guo; Qiao Xu

doi:10.1117/1.OE.53.9.095102

Highly efficient deterministic polishing using a semirigid bonnet

Chunjin Wang, Wei Yang, Zhenzhong Wang, Xu Yang, Zhiji Sun, Bo Zhong, Ri Pan, Ping Yang, Yinbiao Guo, Qiao Xu

Research output: Journal article publication › Journal article › Academic research › peer-review

39 Citations (Scopus)

Abstract

This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ. Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ∼36 mm³ of material is removed.

Original language	English
Article number	140769
Journal	Optical Engineering
Volume	53
Issue number	9
DOIs	https://doi.org/10.1117/1.OE.53.9.095102
Publication status	Published - 1 Sept 2014
Externally published	Yes

Keywords

aspheric optics
bonnet polishing
deterministic polishing
semirigid bonnet

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Engineering

More information

10.1117/1.OE.53.9.095102

Cite this

@article{85b4a1c5d05142488684bcc16f54712a,

title = "Highly efficient deterministic polishing using a semirigid bonnet",

abstract = "This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ. Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ∼36 mm3 of material is removed.",

keywords = "aspheric optics, bonnet polishing, deterministic polishing, semirigid bonnet",

author = "Chunjin Wang and Wei Yang and Zhenzhong Wang and Xu Yang and Zhiji Sun and Bo Zhong and Ri Pan and Ping Yang and Yinbiao Guo and Qiao Xu",

year = "2014",

month = sep,

day = "1",

doi = "10.1117/1.OE.53.9.095102",

language = "English",

volume = "53",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE",

number = "9",

}

TY - JOUR

T1 - Highly efficient deterministic polishing using a semirigid bonnet

AU - Wang, Chunjin

AU - Yang, Wei

AU - Wang, Zhenzhong

AU - Yang, Xu

AU - Sun, Zhiji

AU - Zhong, Bo

AU - Pan, Ri

AU - Yang, Ping

AU - Guo, Yinbiao

AU - Xu, Qiao

PY - 2014/9/1

Y1 - 2014/9/1

N2 - This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ. Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ∼36 mm3 of material is removed.

AB - This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ. Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ∼36 mm3 of material is removed.

KW - aspheric optics

KW - bonnet polishing

KW - deterministic polishing

KW - semirigid bonnet

UR - http://www.scopus.com/inward/record.url?scp=84911937910&partnerID=8YFLogxK

U2 - 10.1117/1.OE.53.9.095102

DO - 10.1117/1.OE.53.9.095102

M3 - Journal article

AN - SCOPUS:84911937910

SN - 0091-3286

VL - 53

JO - Optical Engineering

JF - Optical Engineering

IS - 9

M1 - 140769

ER -

Highly efficient deterministic polishing using a semirigid bonnet

Abstract

Keywords

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this