High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer

G. Zhang; H. Cai; Y. D. Gu; J. F. Song; B. Dong; Z. C. Yang; Y. F. Jin; Y. L. Hao; S. P. Sivalingam; P. H. Yap; D. L. Kwong; A. Q. Liu

doi:10.1109/MEMSYS.2016.7421619

High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer

G. Zhang
, H. Cai
, Y. D. Gu
, J. F. Song
, B. Dong
, Z. C. Yang
, Y. F. Jin
, Y. L. Hao
, S. P. Sivalingam
, P. H. Yap
, D. L. Kwong
, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

An on-chip refractive index (RI) sensor with high sensitivity and large measurement range is demonstrated. The sensing scheme presented here is based on Mach-Zehnder interferometer configuration built on an SOI wafer. The measured wavelength sensitivity reaches 3498.6 nm/RIU (TE-mode). Meanwhile, according to the period changes of interference patterns, the measured period sensitivities are 20.4 nm/RIU (TE-mode) and 61.1 nm/RIU (TM-mode), respectively. Therefore, the fine index change detection limit reaches up to 1.1×10-5 RIU, while the period shift for larger index change detection has a measurement range of several RIU. By making an array, the proposed on-chip sensor has a potential application for multiple samples detection, such as chemical and bio-toxins in drinking water ranging from sub-nanogram to picogram level.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	298-301
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421619
Publication status	Published - 26 Feb 2016
Externally published	Yes
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

More information

10.1109/MEMSYS.2016.7421619

Cite this

Zhang, G., Cai, H., Gu, Y. D., Song, J. F., Dong, B., Yang, Z. C., Jin, Y. F., Hao, Y. L., Sivalingam, S. P., Yap, P. H., Kwong, D. L., & Liu, A. Q. (2016). High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 298-301). Article 7421619 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421619

Zhang, G. ; Cai, H. ; Gu, Y. D. et al. / High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 298-301 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{b8f9da2316a94e63a07787d7ee998c35,

title = "High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer",

abstract = "An on-chip refractive index (RI) sensor with high sensitivity and large measurement range is demonstrated. The sensing scheme presented here is based on Mach-Zehnder interferometer configuration built on an SOI wafer. The measured wavelength sensitivity reaches 3498.6 nm/RIU (TE-mode). Meanwhile, according to the period changes of interference patterns, the measured period sensitivities are 20.4 nm/RIU (TE-mode) and 61.1 nm/RIU (TM-mode), respectively. Therefore, the fine index change detection limit reaches up to 1.1×10-5 RIU, while the period shift for larger index change detection has a measurement range of several RIU. By making an array, the proposed on-chip sensor has a potential application for multiple samples detection, such as chemical and bio-toxins in drinking water ranging from sub-nanogram to picogram level.",

author = "G. Zhang and H. Cai and Gu, \{Y. D.\} and Song, \{J. F.\} and B. Dong and Yang, \{Z. C.\} and Jin, \{Y. F.\} and Hao, \{Y. L.\} and Sivalingam, \{S. P.\} and Yap, \{P. H.\} and Kwong, \{D. L.\} and Liu, \{A. Q.\}",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

year = "2016",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2016.7421619",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Zhang, G, Cai, H, Gu, YD, Song, JF, Dong, B, Yang, ZC, Jin, YF, Hao, YL, Sivalingam, SP, Yap, PH, Kwong, DL & Liu, AQ 2016, High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421619, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 298-301, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421619

High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer. / Zhang, G.; Cai, H.; Gu, Y. D. et al.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 298-301 7421619 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer

AU - Zhang, G.

AU - Cai, H.

AU - Gu, Y. D.

AU - Song, J. F.

AU - Dong, B.

AU - Yang, Z. C.

AU - Jin, Y. F.

AU - Hao, Y. L.

AU - Sivalingam, S. P.

AU - Yap, P. H.

AU - Kwong, D. L.

AU - Liu, A. Q.

PY - 2016/2/26

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N2 - An on-chip refractive index (RI) sensor with high sensitivity and large measurement range is demonstrated. The sensing scheme presented here is based on Mach-Zehnder interferometer configuration built on an SOI wafer. The measured wavelength sensitivity reaches 3498.6 nm/RIU (TE-mode). Meanwhile, according to the period changes of interference patterns, the measured period sensitivities are 20.4 nm/RIU (TE-mode) and 61.1 nm/RIU (TM-mode), respectively. Therefore, the fine index change detection limit reaches up to 1.1×10-5 RIU, while the period shift for larger index change detection has a measurement range of several RIU. By making an array, the proposed on-chip sensor has a potential application for multiple samples detection, such as chemical and bio-toxins in drinking water ranging from sub-nanogram to picogram level.

AB - An on-chip refractive index (RI) sensor with high sensitivity and large measurement range is demonstrated. The sensing scheme presented here is based on Mach-Zehnder interferometer configuration built on an SOI wafer. The measured wavelength sensitivity reaches 3498.6 nm/RIU (TE-mode). Meanwhile, according to the period changes of interference patterns, the measured period sensitivities are 20.4 nm/RIU (TE-mode) and 61.1 nm/RIU (TM-mode), respectively. Therefore, the fine index change detection limit reaches up to 1.1×10-5 RIU, while the period shift for larger index change detection has a measurement range of several RIU. By making an array, the proposed on-chip sensor has a potential application for multiple samples detection, such as chemical and bio-toxins in drinking water ranging from sub-nanogram to picogram level.

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PB - Institute of Electrical and Electronics Engineers Inc.

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ER -

Zhang G, Cai H, Gu YD, Song JF, Dong B, Yang ZC et al. High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 298-301. 7421619. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421619

High sensitivity and large measurement range refractometric sensing based on Mach-Zehnder interferometer

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