High resistance via induced by marginal barrier metal step coverage and F diffusion

Jiyan Dai, S. K. Loh, S. F. Tee, C. L. Tay, S. Ansari, E. Er, S. Redkar

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

12 Citations (Scopus)

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