High resistance via induced by marginal barrier metal step coverage and F diffusion
- Jiyan Dai
- , S. K. Loh
- , S. F. Tee
- , C. L. Tay
- , S. Ansari
- , E. Er
- , S. Redkar
Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review
12
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