Abstract
A thin-film silicon-on-insulator (SOI) gated varactor based on a gated pin diode structure achieves a nominal capacitance of 7pF with a sensitivity of 5pF/V through the anode-cathode voltage. A third terminal provides an additional tuning flexibility and offers a 1pF/V sensitivity. S-parameter measurement reveals a Q of 14. The process is done without any modification to an industrial SOI CMOS process. The nominal capacitance can be varied with different gate bias. With the structure of the varactor, a flexibility in the capacitance tuning range, capacitance-voltage slope and Q values can be achieved by choosing either of the complementary devices and the appropriate biasing condition of Vg and Vd upon circuit requirement.
Original language | English |
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Title of host publication | IEEE International SOI Conference |
Publisher | IEEE |
Pages | 31-32 |
Number of pages | 2 |
Publication status | Published - 1 Dec 1998 |
Externally published | Yes |
Event | Proceedings of the 1998 IEEE International SOI Conference - Stuart, FL, United States Duration: 5 Oct 1998 → 8 Oct 1998 |
Conference
Conference | Proceedings of the 1998 IEEE International SOI Conference |
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Country/Territory | United States |
City | Stuart, FL |
Period | 5/10/98 → 8/10/98 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering