Abstract
This study presents a fast precision measurement method that uses pattern recognition. First, a specific micro-structured surface was designed and manufactured, providing a unique pattern for recognition and matching. Second, a measurement system was proposed based on the algorithms of circle Hough transform (CHT), neural classifier (NC), template matching (TM) and sub-pixel interpolation (SI). Then, a series of experiments were carried out from three aspects: circle detection, length uncertainty, and measurement speed and range. The results showed the correct circle classification percentage was more than 96% and the CHT search accuracy was within a two-pixel level. The length uncertainty test demonstrated the method was able to achieve 90-nm length uncertainty, and a comparison of measurement speeds showed it helped to speed up measurements by a factor of 1000 compared to the original one.
Original language | English |
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Pages (from-to) | 503-514 |
Number of pages | 12 |
Journal | ISA Transactions |
Volume | 101 |
Issue number | June |
DOIs | |
Publication status | Published - Jun 2020 |
Keywords
- Image processing
- Neural network
- Polar microstructure
- Precision measurement
ASJC Scopus subject areas
- Control and Systems Engineering
- Instrumentation
- Computer Science Applications
- Electrical and Electronic Engineering
- Applied Mathematics