Abstract
We report a compact flat-top beam shaper fabricated by laser-assisted chemical etching upon an ion-exchanged high-energy-beam-sensitive glass. The beam shaper combines a phase filter element and a focusing lens element into a single diffractive optical element with a quasi-continuous surface relief profile. The fabrication takes advantage of the laser generation of gray-level patterns and one-step etching that are effective especially for such beam shaper fabrication. The demonstrated beam shaper with good flatness and edge features has an energy efficiency of 82%.
Original language | English |
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Pages (from-to) | 208-213 |
Number of pages | 6 |
Journal | Optical Engineering |
Volume | 38 |
Issue number | 2 |
DOIs | |
Publication status | Published - 1 Jan 1999 |
Externally published | Yes |
Keywords
- Beam shaping
- Diffractive optical element
- Flat-top beam
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- General Engineering