Heterodyne common path interferometers for surface profilometry and characterization

Keyphrases

• Surface Characterization 100%
• Interferometer 100%
• Surface Profilometry 100%
• Common-path Interferometer 100%
• Heterodyne 100%
• Common Path 50%
• Phase Difference 50%
• Interferometer System 50%
• Tightly Focused Beam 50%
• Two-beam 50%
• Phase Variation 50%
• Heterodyne Interferometer 50%
• Reflection Coefficient 50%
• Similar Path 50%
• Local Phase 50%
• Deleterious Effects 50%
• Relative Phase 50%
• Reference Beam 50%
• Large Spot 50%
• Average Sample number 50%

Physics

• Relative Phase 25%