Growth of highly orientated strontium barium niobate thin films on Si substrates through the sol-gel process using a K: SBN template layer

Hui Ye, Zhiru Shen, Chee Leung Mak, K. H. Wong

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)

Abstract

We report the growth of highly C-axis orientation of SrxBa1-xNb2O6(SBN) thin films on p-type (100) Si substrates by using a potassium-substituted SBN template layer with the sol-gel method. The crystallization of SBN thin films was found closely related to the potassium ion doping concentration and the postannealing temperature of the K-SBN template layer. Secondary ion mass spectrometry analysis showed that potassium elements were accumulated at the interface of the template layer and silicon substrate. SBN films postannealed at 750 °C with K-SBN template layer has a smaller full width at half maximum of X-ray rocking curve of 2.45° than that of 5.40° for the pure SBN films. By introducing a template layer, the surface morphologies of SBN films fabricated on silicon substrate were greatly improved. 2006.
Original languageEnglish
Pages (from-to)7283-7287
Number of pages5
JournalJournal of Materials Science
Volume41
Issue number22
DOIs
Publication statusPublished - 1 Nov 2006

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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