Growth of carbon nanotube bundles on microscratched surfaces

Lei Huang, Shu Ping Lau, Z. Sun, Kenneth B.K. Teo, B. K. Tay

Research output: Journal article publicationJournal articleAcademic researchpeer-review


In this paper, we demonstrated a roughness dependent chemical vapor deposition (CVD) process to selectively grow aligned carbon nanotube bundles on silicon substrates with microscratches. Our results show that the aligned nanotubes of uniform length (around 2 μm) and diameter (20-30 nm) are assembled to nanotube bundles and in-plane vertically aligned with the microscratches. The microscratch-selective nanotube growth offers a promising approach for the fabrication of 3-D nanotube architectures in a single CVD process.
Original languageEnglish
Pages (from-to)419-422
Number of pages4
JournalInternational Journal of Nanoscience
Issue number4
Publication statusPublished - 1 Aug 2005
Externally publishedYes


  • Aligned carbon nanotubes
  • Carbon nanotubes
  • Chemical vapor deposition
  • Reactive ion etching

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Materials Science(all)
  • Condensed Matter Physics
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this