Global sliding mode-based tracking control of a piezo-driven XY micropositioning stage with unmodeled hysteresis

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

14 Citations (Scopus)

Abstract

In this paper, a global sliding mode control (GSMC) scheme is implemented on a piezo-driven XY parallel micropositioning stage to compensate for the unmodeled hysteresis aiming at a sub-micron accuracy motion tracking control. The GSMC controller is designed with the consideration of all uncertainty bounds. In the controller implementation, a high-gain velocity observer is adopted to estimate the feedback velocity from the measured position. The effectiveness of the GSMC over ordinary SMC and traditional PID control is demonstrated through simulations, while the variations of design parameters on control performances are examined as well. Results show that the GSMC can reduce the hysteresis to a negligible level and lead to a sub-micron accuracy tracking with tolerance to some degrees of external disturbances, which provides a sound base of practical control of the microposition-ing system for micro/nano scale manipulation.
Original languageEnglish
Title of host publication2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009
Pages755-760
Number of pages6
DOIs
Publication statusPublished - 11 Dec 2009
Externally publishedYes
Event2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009 - St. Louis, MO, United States
Duration: 11 Oct 200915 Oct 2009

Conference

Conference2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009
CountryUnited States
CitySt. Louis, MO
Period11/10/0915/10/09

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Control and Systems Engineering

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